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Design and Analysis of a MEMS Comb Vibratory - University of

Design and Analysis of a MEMS Comb Vibratory - University of 2025

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The document is a Master Thesis by Haifeng Dong, focusing on the design and analysis of a MEMS (Micro-electro-mechanical Systems) Comb Vibratory Gyroscope. It details the principles of MEMS technology, the proposed gyroscope's structure, and its operational mechanics involving electrostatic driving and differential capacitance sensing. The thesis discusses various design considerations, performance metrics such as sensitivity and resonant frequency, and fabrication processes including photolithography and DRIE etching. Simulation results indicate high sensitivity and quality factors for the device, suggesting its potential applications in inertial navigation across various fields.

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