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in this short video Ill describe how to use casa XPS to determine Tomic percent information of XPS data this vamos file was opened in Casa data were obtained using surface science instruments of XPS system survey scans were collected using 150 volt passage only pass energy to which the SSI system is calculated you can change block names using the edit sample ID button you can rearrange lines using the Edit by row button double-click on a block to show the data I use the library button to open the periodic table and select elements of interest click create regions if you are casa miss an element in this case for silicon just zoom in on the area by creating a box and clicking on it click the quantify button youre going to create a region adjust the borders so the background looks reasonable atomic percents incasa are calculated using the peak area above the background dividing by the relative sensitivity factor or RSF and then comparing with the other elements therefore its very impor
