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an element library in XPS serves two functions one is to identify Peaks with an XPS spectrum and the other is to assist the quantification by XPS quantification requires peak areas to be calculated and then these peak areas are scaled by what is referred to as a total sensitivity factor and this total sensitivity factor is the product of the transmission response for an instrument which varies as a function of kinetic energy the escape depth that relates to the inelastic scattering of electrons that varies as a function of kinetic energy the cross section that is related to the probability of a photon of a given energy ionizing an atom and then finally thereamp;#39;s an angular distribution correction that relates to the relationship between the x-rays as they arrive at the sample and the direction sampling the electrons leaving the material and so that relates to the angle between the x-ray source and the analyzer and once all of these have been combined together we end up with this
