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for a semiconductor fan a contaminated wafer presents a mystery to be solved there can be any number of causes but this one is hiding in plain sight a contaminated processed gas filter that degraded silently over time when new filters effectively trapped tiny particles in processed gases through a combination of forces however filters have a finite lifetime as particles accumulate over time passages within the filter become constricted this increases differential pressure which can impact gas flow rate because a consistent flow rate has been maintained the system does not perceive risk however increased pressure means increased gas velocity which can lead to previously trapped particles being released back into the gas stream if these particles pass to the wafer contamination docHubes the wafer and costly defects can result fortunately theres a solution during your next scheduled maintenance check if your gas filters are also due to be replaced and eliminate that variable from your mys
