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Quantification by XPS is typically reported in a table showing atomic concentrations which can be used to calculate material formulae. In this tutorial, quantification regions for oxygen, silicon, and carbon are applied to fused silica (SiO2). Relationships between silicon and oxygen are shown, along with carbon contamination. Atomic concentrations are calculated using background regions and peak areas. Scaling factors are applied to measure substance amounts based on peak intensity. This video explains correction factors and their application to XPS data for accurate quantification.